Products

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Spot spectral confocal measurement microscope system (piezoelectric) of the spectral confocal module measurement and the main imaging optical path co-axial, there is no obstruction problem, and focus detection spot is small, can be slots, holes, pits and other areas of accurate measurement, can be integrated with the motion control unit to achieve high-speed precision focusing

Product Advantages

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1. Objective lenses can be connected with either independent interface or 6-aperture nose wheel module;.

2. Spectral Confocal Module has a simple structure, high measurement accuracy and speed.

3. It is most suitable for surfaces with high reflectivity, and also for transparent surfaces.

4. Adaptable to both domestic and international mainstream objective lenses.

5. Spectral confocal module measurement is co-axial with the main imaging optical path, there is no obstruction problem, and the focus detection spot is small, so it can accurately measure slots, holes, pits and other areas;

6. Support differential interference observation mode.

Areas of application

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Widely used in electronics, semiconductor, panel, equipment and other industries. Measurement of height, segment difference, thickness, flatness, contour of glass, ceramics, mirrored metal, such as cell phones, PCB, tempered glass screen protector, semiconductor wafers.