Products

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The Spot Spectral Autofocus Program (piezo) is a non-contact displacement measurement system up to the sub-micron level, which can measure the displacement or thickness of objects with diffuse or mirror reflections on the surface, as well as transparent materials. Based on the coaxial nature of the output and return signal paths, the Spot Spectral Autofocus Program (piezo) is also suitable for deep/blind hole measurements. Application.

Product Features

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1. the objective lens can choose independent interface, also can choose 6 holes nose wheel module connection;

2. It can be adapted to both domestic and foreign mainstream objective lenses;

3. the spectral confocal module has a simple structure, high measurement accuracy and speed;

4. It is most suitable for surfaces with high reflectivity, and is also suitable for transparent surfaces;

5. the measurement of spectral confocal module is co-axial with the main imaging optical path, there is no blocking problem, and the focusing detection spot is small, so it can accurately measure slots, holes, pits and other areas;

6. Support differential interference observation mode;

7. can be integrated with motion control unit to realize high-speed accurate focusing.

Areas of application

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Widely used in electronics, semiconductor, panel, equipment and other industries. Measurement of height, segment difference, thickness, flatness, contour of glass, ceramics, mirrored metal, such as cell phones, PCB, tempered glass screen protector, semiconductor wafers.