The Critical Role of Dual Telecentric Lenses in Semiconductor Manufacturing

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2025/03/04

author:adminBOSS

In the highly sophisticated and complex industry of semiconductor manufacturing, every small error can have a significant impact on the performance of the final product. Therefore, choosing the right measurement and inspection tools is crucial. Double telecentric lenses, with their unique advantages, play an indispensable role in this field.

 

 

The cornerstone of high-precision measurement


The manufacturing process of semiconductor chips requires extreme precision, and any small dimensional deviation can lead to functional failure or performance degradation. Through its special optical design, the double telecentric lens eliminates parallax and aberrations, ensuring highly accurate measurements at any position within the field of view. This feature makes the dual telecentric lens ideal for inspecting chip size, shape and positional accuracy in semiconductor manufacturing.

 

 

Adaptable to complex process environments


Semiconductor manufacturing involves a variety of complex process steps, such as photolithography, etching, ion implantation, etc., which are often accompanied by extreme conditions such as high temperature, high pressure or strong radiation. The double telecentric lens can not only maintain stable image quality in these extreme environments, but also effectively resist the interference of stray light to ensure that the image contours are clear, providing a reliable basis for subsequent precision measurement and quality control.

 

 

Large depth of field supports multi-layer inspection


Semiconductor chips are usually composed of multi-layer structures, and each layer requires precise measurement and inspection. The large depth of field of the dual telecentric lens enables it to image feature points at different heights simultaneously, which is crucial for detecting small defects in multilayer structures. Whether it's scratches, contamination on the chip surface or anomalies in the internal structure, the dual telecentric lenses can accurately capture them to ensure product quality.

 

 

Improving productivity and automation


In semiconductor manufacturing, time is money. The efficient imaging and measuring capabilities of the double telecentric lens, combined with advanced machine vision algorithms, can realize fast and accurate automated inspection, greatly improving production efficiency. At the same time, the stability and reliability of the dual telecentric lens also reduces downtime due to equipment failure, further improving the efficiency and stability of the overall production line.

 

 

Promoting the continuous progress of semiconductor technology


With the continuous development of semiconductor technology, the chip size is getting smaller and smaller, the structure is getting more and more complex, and the requirements for measurement and inspection technology are getting higher and higher. With its excellent performance, the double telecentric lens continues to meet the new needs of the semiconductor manufacturing field and promote the continuous progress of technology. From 7nm to 5nm, to the future 3nm and below process, double telecentric lens is one of the key tools to realize these technological breakthroughs.

 

 

Double telecentric lenses in semiconductor manufacturing not only improve the accuracy and efficiency of measurement, but also promote the continuous progress of semiconductor technology.

 

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